Assay (H2O2) 30 ~ 32%
Color ≤ 5 APHA
Total Organic Carbon (TOC) ≤ 30 ppm
Chloride (Cl) ≤ 50 ppb
Nitrate (NO3) ≤ 100 ppb
Phosphate (PO4)≤ 50 ppb
Sulfate (SO4) ≤ 100 ppb
Al≤ 1 ppbCr≤ 1 ppbMg≤ 1 ppbTa≤ 1 ppbSb≤ 1 ppbCo≤ 1 ppb
Mn≤ 1 ppbTl≤ 1 ppbAs≤ 1 ppbCu≤ 1 ppbMo≤ 1 ppbSn≤ 1 ppb
Ba≤ 1 ppbGa≤ 1 ppbNi≤ 1 ppbTi≤ 1 ppbBe≤ 1 ppbGe≤ 1 ppb
Nb≤ 1 ppbV≤ 1 ppbBi≤ 1 ppbAu≤ 1 ppbK ≤ 1 ppbZn≤ 1 ppb
B ≤ 1 ppbFe≤ 1 ppbAg≤ 1 ppbZr≤ 1 ppbCd≤ 1 ppbPb≤ 1 ppb
Na≤ 1 ppbCa≤ 1 ppbLi≤ 1 ppbSr≤ 1 ppb
Particulate count
≥ 0.2 micron ≤ 200 pcs/ml
≥ 0.5 micron ≤ 80 pcs/ml